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US 11,490,473 B2Granted
Method and apparatus for the thermal treatment of a substrate
AssigneesLeander Kilian Gross, Mascha Elly Gross
InventorHarald Gross
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AssigneesLeander Kilian Gross, Mascha Elly Gross
InventorHarald Gross
Estimating the term…
In an apparatus for thermal treatment of substrates, a gas discharge lamp runs in a simmer mode in standby operation. A constant power supply may be connected to the gas discharge lamp via a first switch. At least one charged capacitor may be connected to the gas discharge lamp via a second switch. A thermal treatment of the end side of a substrate with a duration of between 20 milliseconds and 500 milliseconds is provided in a manner governed by light absorption. This time window is advantageous for thermal treatment of coatings having a thickness of 2 to 200 micrometers, wherein the temperature of the rear side of the substrate can remain below that of the end side. The temperature on the end side can be significantly increased by the gas discharge lamp being connected to the capacitor via the second switch at the end of the time window.
A method for thermal treatment of a substrate using at least one gas discharge lamp wherein, in an operating mode, a capacitor previously charged via a power supply is discharged via the at least one gas discharge lamp, wherein the at least one gas discharge lamp is operated for a first period of time having a duration of 20 ms to 5 seconds at a constant electrical power with a power level at least one order of magnitude lower than in the operating mode, and at the end of the first period of time, average electrical power to the gas discharge lamp is increased by at least one order of magnitude for a second period of time having a duration of 50 μs to 20 ms.
An apparatus for thermal treatment of a substrate using at least one gas discharge lamp, which has a simmer operation in a standby mode and which in an operating mode is connectable to at least one electrically charged capacitor via a first electronic switch, wherein the gas discharge lamp is connectable via a second electronic switch to a power supply of constant power of at least one order of magnitude less than in the operating mode for a duration of 20 milliseconds to 5 seconds.
Dependencies are inferred from the claim text.