Substrate support structure and method of forming the same

A substrate support structure comprising:

• a substrate support including:
• a support body;
• and a protrusion including a base portion and a leading-end portion larger in outer diameter than the base portion, the protrusion protruding from the support body;
• and
• a substrate having:
• a substrate body;
• a through hole provided at the substrate body;
• and a protruded portion surrounding the through hole, the protruded portion protruding from a first face that is one face in a thickness direction of the substrate body, wherein
• the base portion of the protrusion passes through the through hole,
• the leading-end portion of the protrusion protrudes from the first face of the substrate body inside the protruded portion, abuts the protruded portion, and engages with the substrate body such that the through hole is covered,
• a portion of the first face, extended from the through hole to the protruded portion, is exposed by the protruded portion,
• the portion of the first face is concentric with the through hole and with the protrusion, and
• an entirety of the portion of the first face is covered by the leading-end portion of the protrusion.