Read/write device for a hard-disk memory system, and corresponding manufacturing process

A memory system, comprising:

• a magnetic disk with a plurality of magnetic tracks configured to store data;
• and
• a read/write device including:
• a fixed structure;
• a membrane region including first and second membranes, which are coupled to the fixed structure, and a central portion, interposed between the first and second membranes;
• first and second piezoelectric actuators, which are mechanically coupled to the first and the second membranes, respectively;
• and
• a read/write head, which is fixed to the central portion of the membrane region,
• wherein the first and the second piezoelectric actuators are configured to cause corresponding deformations in the first and second membranes, respectively,
• the deformations in the first and second membranes cause corresponding movements of the read/write head with respect to the fixed structure,
• the read/write device is laterally delimited by a side surface,
• the read/write head overlies the central portion of the membrane region and has a first end, which is fixed to the fixed structure, and a second end, which is laterally staggered with respect to the first end and extends over the side surface,
• the side surface extends over the magnetic disk.

A process for manufacturing a read/write device for a hard-disk memory system, the process comprising:

• forming a fixed structure;
• forming a membrane region including first and second membranes, which are coupled to the fixed structure, and a central portion interposed between the first and second membranes;
• forming first and second piezoelectric actuators, which are mechanically coupled to the first and second membranes, respectively;
• forming a read/write head, which is fixed to the central portion of the membrane region;
• and
• forming a side surface that laterally delimits the read/write device,
• wherein the forming of the first and second piezoelectric actuators includes forming the first and second piezoelectric actuators so that the first and second piezoelectric actuators are configured to cause corresponding deformations of the first and second membranes, respectively,
• the deformations in the first and second membranes cause corresponding movements of the read/write head with respect to the fixed structure,
• the forming of the read/write head includes forming the read/write head so that the read/write head overlies the central portion of the membrane region and has a first end, which is fixed to the fixed structure, and a second end, which is laterally staggered with respect to the first end and extends over the side surface.