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US 11,480,877 B2Granted
Resist composition, method for forming resist pattern, and polyphenol compound used therein
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsTakumi Toida, Masatoshi Echigo, Takashi Sato, Youko Shimizu
Life of this patent
Estimating the term…
Abstract
The present invention is a compound represented by the following general formula (1).
Claims21
A compound represented by the following general formula (1):
- wherein each X is independently an oxygen atom, or a sulfur atom;
- R1 is a 2n-valent group of 1 to 30 carbon atoms;
- R2 and R3 are each independently a halogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, an alkenyl group of 2 to 10 carbon atoms, an alkoxy group of 1 to 30 carbon atoms, a thiol group, or a hydroxy group;
- each m is independently an integer of 0 to 7, provided that at least one m is an integer of 1 to 7;
- each p is 1;
- and n is an integer of 1 to 4;
- provided that R1 is a group comprising an iodine atom, and at least one R2 and/or at least one R3 is one or more selected from a hydroxy group and a thiol group.
4 more elements
A resin having a structure represented by the following general formula (Z):
- wherein each X is independently an oxygen atom, or a sulfur atom;
- R1 is a 2n-valent group of 1 to 30 carbon atoms;
- R2 and R3 are each independently a halogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, an alkenyl group of 2 to 10 carbon atoms, an alkoxy group of 1 to 30 carbon atoms, a thiol group, or a hydroxy group;
- each Y is independently a single bond or a linear or branched alkylene group of 1 to 20 carbon atoms;
- each m2 is independently an integer of 0 to 6, provided that at least one m2 is an integer of 1 to 6;
- each p is 1;
- and n is an integer of 1 to 4;
- provided that R1 is a group comprising an iodine atom, and at least one R2 and/or at least one R3 is one or more selected from a hydroxy group and a thiol group.
5 more elements
Dependencies are inferred from the claim text.