Device with at least one adjustable sample holder and method of changing holder tilt angle and method of preparing a lamella
AssigneeTESCAN Brno, s.r.o.
InventorsPavel Dolezel, Tomas Hrncir
Life of this patent
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Abstract
A device comprises an electron column or an ion column, provided with an adjustable holder. The adjustable holder maintains the whole range of movements of the manipulation stage and is adapted to change its position in relation to the stage at least in one direction, wherein the range of movements of the manipulation stage is sufficient to change this position and it is unnecessary to install any other control drive or actuator.
Claims17
A device with at least one adjustable sample holder comprising an adjustable sample holder located inside a working chamber on a placement area of a manipulation stage, wherein the adjustable sample holder comprises a moveable element with a place for sample placement, a revolving shaft having a longitudinal axis, at least one pillar adapted to support the shaft, the device further comprising a mechanism for fixing the moveable element comprising a crown mounted on the shaft and a counterpart adapted to immobilize the shaft in relation to the counterpart, the mechanism for fixing further being adapted to set the moveable element into a stationary position, in which a movement range of the manipulation stage is retained, and a moveable position, in which the adjustable sample holder has at least one degree of freedom, wherein in the moveable position of the moveable element is adapted for rotation around a longitudinal axis of the shaft, allowing changing of the position of the placement area in relation to the moveable element.
Dependencies are inferred from the claim text.