US 11,474,169 B2 · Magnetic material observation method, and magnetic material observation apparatus

Abstract

A magnetic material observation method in accordance with the present invention includes: an irradiating step including irradiating a region of a sample with an excitation beam and thereby allowing a magnetic element contained in the sample to radiate a characteristic X-ray; a detecting step including detecting intensities of a right-handed circularly polarized component and a left-handed circularly polarized component contained in the characteristic X-ray; and a calculating step including calculating the difference between the intensity of the right-handed circularly polarized component and the intensity of the left-handed circularly polarized component. Reference to such a difference enables precise measurement of the direction or magnitude of magnetization without strict limitations as to the sample.

Claims14

Dependent claims

A magnetic material observation method for observing a direction of magnetization or a magnitude of magnetization of a sample that contains a magnetic material, the method comprising:

an irradiating step comprising irradiating a region of the sample with an excitation beam, the excitation beam being a beam that allows an element included in the magnetic material to radiate a characteristic X-ray upon irradiation of the sample with the beam;
a detecting step comprising recognizing, as intensities of two circularly polarized components in respective rotation directions, the characteristic X-ray radiated from the element upon irradiation of the sample with the excitation beam;
and
a calculating step comprising calculating a difference between the intensities of the two circularly polarized components recognized in the detecting step.

1 more element

A magnetic material observation apparatus for observing a direction of magnetization or a magnitude of magnetization of a sample that contains a magnetic material, the magnetic material observation apparatus comprising:

an excitation beam source configured to emit an excitation beam, the excitation beam being a beam that allows an element included in the magnetic material to radiate a characteristic X-ray upon irradiation of the sample with the beam;
a detecting section configured to detect the characteristic X-ray, radiated by the element upon irradiation of the sample with the excitation beam, as circularly polarized components different in direction of rotation, the circularly polarized components being a right-handed circularly polarized component and a left-handed circularly polarized component;
and
a data processing section configured to carry out output of values each calculated from a difference between an intensity of the right-handed circularly polarized component and an intensity of the left-handed circularly polarized component.

1 more element

Dependencies are inferred from the claim text.

Magnetic material observation method, and magnetic material observation apparatus

Life of this patent

Magnetic material observation method, and magnetic material observation apparatus

Life of this patent

Abstract

Claims14