Apparatus and methods for micro-transfer-printing
AssigneeX Display Company Technology Limited
InventorsChristopher Bower, Matthew Meitl, David Gomez, Salvatore Bonafede, David Kneeburg
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Abstract
In an aspect, a system and method for assembling a semiconductor device on a receiving surface of a destination substrate is disclosed. In another aspect, a system and method for assembling a semiconductor device on a destination substrate with topographic features is disclosed. In another aspect, a gravity-assisted separation system and method for printing semiconductor device is disclosed. In another aspect, various features of a transfer device for printing semiconductor devices are disclosed.
Claims37
A conformable micro-transfer printing device for parallel micro-transfer printing of printable elements to a destination substrate, the micro-transfer printing device comprising:
- a rigid planar support;
- and
- an elastomer stamp, the elastomer stamp comprising:
- a bulk volume having a first surface and a second surface opposite the first surface, the second surface in direct contact with the rigid planar support;
- and
- a plurality of spatially separated posts disposed on the first surface of the bulk volume in a regular array, wherein:
- each of the posts is a multi-tiered post comprising geometrically similar tiers with a successively smaller cross section on each successive tier of the post, and
- the geometrically similar tiers of each of the posts comprise a base tier and a top tier, the base tier being in contact with the first surface of the bulk volume and the top tier having an exposed micro-transfer printing contact surface opposite the first surface of the bulk volume, wherein the micro-transfer printing contact surface exhibits rate-dependent adhesion to one of the printable elements during micro-transfer printing, and
- the bulk volume, the base tier, and the top tier comprise a same material, the top tier and the base tier comprise a same material, or the bulk volume and the base tier comprise a same material.
Dependencies are inferred from the claim text.