Spacer, laminate of substrates, method for manufacturing substrate, and method for manufacturing substrate for magnetic disk
AssigneeHoya Corporation
InventorMasao Takano
Life of this patent
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Abstract
The area of a spacer that is to be provided between the adjacent substrates in a laminate including a plurality of substrates to keep the adjacent substrates apart from each other is smaller than those of the stacked substrates. When pressure is released to bring the laminate obtained by providing the spacers between the substrates from a pressed state in which 0.60 MPa of pressure is applied to the laminate in the stacking direction into a non-pressed state, an amount of change ΔW in thickness per spacer that is calculated from a change in the thickness of the laminate due to the release of pressure is 30 μm or less.
Claims13
A sheet-like spacer to be used when a laminate of a plurality of substrates is formed for the purpose of processing end faces of the substrates, the spacer being provided between the adjacent substrates in the laminate to keep the adjacent substrates apart from each other,
- wherein an area of the spacer is smaller than that of the substrates, and
- when pressure is released to bring the laminate obtained by providing the spacers between the substrates from a pressed state in which 0.60 MPa of pressure is applied to the laminate in a stacking direction into a non-pressed state, an amount of change ΔW in thickness per spacer that is calculated from a change in the thickness of the laminate due to the release of pressure is 30 μm or less.
Dependencies are inferred from the claim text.