Photodetector device including a photoactive semiconductor over a conductor pattern and method of making the same

A photoactive device, comprising:

• an insulator pattern over a first conductor pattern;
• wherein the insulator pattern exposes the first conductor pattern in one or more via regions;
• a second conductor pattern over the insulator pattern, which second conductor pattern contacts the first conductor pattern in the one or more via regions;
• one or more further conductor patterns between the first and second conductor patterns;
• a plugging pattern over the second conductor pattern and creating a more even topographic surface profile in the one or more via regions, with the second conductor pattern exposed outside the one or more via regions;
• a photoactive semiconductor over the plugging pattern and over the second conductor pattern for charge carrier transfer between the second conductor pattern and the photoactive semiconductor selectively outside the one or more via regions;
• and
• a third conductor over the photoactive semiconductor, for charge carrier transfer between the third conductor and the photoactive semiconductor;
• wherein the first conductor pattern forms part of electrical circuitry for detection/measurement of a photo-induced electrical response of the photoactive semiconductor.

A photoactive device, comprising:

• an insulator pattern over a first conductor pattern;
• wherein the insulator pattern exposes the first conductor pattern in one or more via regions;
• one or more further conductor patterns between the first conductor pattern and the insulator pattern;
• a second conductor pattern over the insulator pattern, which second conductor pattern contacts the first conductor pattern in the one or more via regions;
• a plugging pattern over the second conductor pattern and creating a more even topographic surface profile in the one or more via regions, with the second conductor pattern exposed outside the one or more via regions;
• a photoactive semiconductor over the plugging pattern and over the second conductor pattern for charge carrier transfer between the second conductor pattern and the photoactive semiconductor selectively outside the one or more via regions;
• and
• a third conductor over the photoactive semiconductor, for charge carrier transfer between the third conductor and the photoactive semiconductor;
• wherein the first conductor pattern forms part of electrical circuitry for detection/measurement of a photo-induced electrical response of the photoactive semiconductor.