US 11,469,086 B2 · Method for manufacturing a multilayer radiation window and a multilayer radiation window

Abstract

A method is for manufacturing a multilayer radiation window for an X-ray measurement apparatus. The method includes: producing a gas diffusion stop layer made of silicon nitride on a polished surface of a carrier; producing at least one combined layer on an opposite side of the gas diffusion stop layer than the carrier; attaching the combined structure including the carrier, the gas diffusion stop layer, the at least one combined layer to a region around an opening in a support structure with the at least one combined layer facing the support structure; and etching away the carrier. The at least one combined layer includes: a light attenuation layer made of aluminium, and a strengthening layer. A radiation window is manufactured with the method.

Claims15

Dependent claims

A method for manufacturing a multilayer radiation window for an X-ray measurement apparatus, comprising:

producing a gas diffusion stop layer made of silicon nitride on a polished surface of a carrier;
producing a plurality of combined layers on an opposite side of said gas diffusion stop layer than said carrier, wherein each combined layer of the plurality of combined layers comprises:
a light attenuation layer made of aluminium, and
a strengthening layer made of one of the following:
carbon filled polymer, boron carbide, diamond-like carbon (DLC);
attaching the combined structure comprising said carrier, said gas diffusion stop layer, said plurality of combined layers to a region around an opening in a support structure with the plurality of combined layers facing said support structure;
and
etching away said carrier.

5 more elements

Dependencies are inferred from the claim text.

Method for manufacturing a multilayer radiation window and a multilayer radiation window

Life of this patent

Method for manufacturing a multilayer radiation window and a multilayer radiation window

Life of this patent

Abstract

Claims15