Electromechanical relay with deformable conductive beam and drain electrode
AssigneeThe University of Bristol
InventorsDinesh Pamunuwa, Sunil Rana
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Abstract
A micro or nano electromechanical relay device (10) comprising a source electrode (204) an electrically conductive beam (202) comprising an arcuate portion (12a) coupled to the source electrode by an arm portion, first and second drain electrodes (DE1, DE2) and first and second actuator electrodes (AE1, AE2). The arc of the arcuate portion defines a beam axis (BA). The arcuate portion is mounted for pivotal movement about a pivot axis (PA) which is coaxial or generally coaxial with the beam axis.
Claims20
A micro or nano electromechanical relay device comprising:
- a source electrode;
- an electrically conductive beam comprising an arcuate portion coupled to the source electrode by an arm portion;
- first and second drain electrodes;
- and
- first and second actuator electrodes,
- wherein:
- the arc of the arcuate portion defines a beam axis;
- the arcuate portion is mounted for pivotal movement about a pivot axis which is coaxial or generally coaxial with the beam axis;
- the first actuator electrode is arranged to bias the arcuate portion to pivot about the pivot axis in a first direction into electrical contact with the first drain electrode;
- the second actuator electrode is arranged to bias the arcuate portion to pivot about the pivot axis in a second direction opposite to the first direction into electrical contact with the second drain electrode;
- the first actuator electrode has a first arcuate surface facing the arcuate portion, the first arcuate surface defining a first axis which is generally coaxial with respect to the beam axis;
- and
- the second actuator electrode has a second arcuate surface facing the arcuate portion, the second arcuate surface defining a second axis which is generally coaxial with respect to the beam axis,
- such that while the arcuate portion pivots about the pivot axis there is a first generally uniform gate gap between the first arcuate surface and the arcuate portion, and a second generally uniform gate gap between the second arcuate surface and the arcuate portion,
- wherein the first gate gap and the second gate gap are constant during all modes of operation.
A non-volatile computing device comprising:
- one or more electromechanical relay devices each comprising
- a source electrode,
- an electrically conductive beam comprising an arcuate portion coupled to the source electrode by an arm portion,
- first and second drain electrodes, and
- first and second actuator electrodes,
- wherein:
- the arc of the arcuate portion defines a beam axis,
- the arcuate portion is mounted for pivotal movement about a pivot axis which is coaxial or generally coaxial with the beam axis,
- the first actuator electrode is arranged to bias the arcuate portion to pivot about the pivot axis in a first direction into electrical contact with the first drain electrode,
- the second actuator electrode is arranged to bias the arcuate portion to pivot about the pivot axis in a second direction opposite to the first direction into electrical contact with the second drain electrode,
- the first actuator electrode has a first arcuate surface facing the arcuate portion, the first arcuate surface defining a first axis which is generally coaxial with respect to the beam axis, and
- the second actuator electrode has a second arcuate surface facing the arcuate portion, the second arcuate surface defining a second axis which is generally coaxial with respect to the beam axis,
- such that while the arcuate portion pivots about the pivot axis there is a first generally uniform gate gap between the first arcuate surface and the arcuate portion, and a second generally uniform gate gap between the second arcuate surface and the arcuate portion,
- wherein the first gate gap and the second gate gap are constant during all modes of operation.
Dependencies are inferred from the claim text.