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US 11,467,107 B2Granted
X-ray analysis apparatus and x-ray generation unit
AssigneeHoriba, Ltd.
InventorTomoki Aoyama
Life of this patent
Estimating the term…
Abstract
The X-ray analysis apparatus contains an X-ray generation unit. The X-ray generation unit includes a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate, and a driving unit that changes a position of the target plate or the X-ray convergence optics relative to the electron beam source.
Claims11
An X-ray analysis apparatus comprising:
- an X-ray generation unit,
- a stage mounted with a to-be-irradiated object irradiated with X-rays generated by the X-ray generation unit, and
- an X-ray detection unit that detects X-ray fluorescence released from the to-be-irradiated object,
- wherein the X-ray generation unit includes
- an electron beam source that generates an electron beam,
- a target plate having a target that is irradiated with the electron beam generated by the electron beam source and generates X-rays,
- X-ray convergence optics that converges X-rays generated from the target, and
- a driving unit that causes a change of a position of the target plate relative to the electron beam source or a change of a position of the X-ray convergence optics relative to the electron beam source, wherein
- the position of the X-ray convergence optics is changed in conjunction with the change in the position of the target plate caused by the driving unit, or
- the position of the target plate is changed in conjunction with the change in the position of the X-ray convergence optics caused by the driving unit.
7 more elements
An X-ray generation unit comprising:
- an electron beam source that generates an electron beam;
- a target plate having a target that is irradiated with the electron beam generated by the electron beam source and generates X-rays;
- X-ray convergence optics that converges X-rays generated from the target;
- and
- a driving unit that causes a change of a position of the target plate relative to the electron beam source or a change of a position of the X-ray convergence optics relative to the electron beam source, wherein
- the position of the X-ray convergence optics is changed in conjunction with the change in the position of the target plate caused by the driving unit, or
- the position of the target plate is changed in conjunction with the change in the position of the X-ray convergence optics caused by the driving unit.
4 more elements
Dependencies are inferred from the claim text.