Laser light irradiating device
AssigneeHamamatsu Photonics K.K.
InventorJunji Okuma
Life of this patent
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Abstract
There is provided a laser light irradiating device that includes a spatial light modulator configured to modulate laser light output from a laser light source according to a phase pattern and emit the modulated laser light, an objective lens configured to converge the laser light emitted from the spatial light modulator onto the object, a focusing lens arranged between the spatial light modulator and the objective lens in an optical path of the laser light and configured to focus the laser light, and a slit member arranged at a focal position on a rear side of the focusing lens in the optical path of the laser light and configured to block a part of the laser light.
Claims10
A laser light irradiating device configured to irradiate an object with laser light along a first direction, the laser light irradiating device comprising:
- a laser light source configured to output the laser light;
- a spatial light modulator configured to modulate the laser light output from the laser light source according to a phase pattern and emit the laser light;
- an objective lens configured to converge the laser light emitted from the spatial light modulator onto the object;
- a focusing lens arranged between the spatial light modulator and the objective lens in an optical path of the laser light and configured to focus the laser light;
- and
- a slit member arranged at a focal position on a rear side of the focusing lens in the optical path of the laser light and configured to block a part of the laser light, wherein
- the phase pattern includes a first pattern in which a part of the laser light entering a pupil plane of the objective lens is modulated and a second pattern in which a remainder of the laser light is modulated,
- the second pattern includes a diffraction lattice pattern for branching the remainder of the laser light into a plurality of diffracted light along a second direction crossing the first direction, and
- the slit member blocks the diffracted light with a slit.
A laser light irradiating device configured to irradiate an object with laser light along a first direction, the laser light irradiating device comprising:
- a laser light source configured to output the laser light;
- a spatial light modulator configured to modulate the laser light output from the laser light source according to a phase pattern and emit the laser light;
- an objective lens configured to converge the laser light emitted from the spatial light modulator onto the object;
- a focusing lens arranged between the spatial light modulator and the objective lens in an optical path of the laser light and configured to focus the laser light;
- and
- a slit member arranged at a focal position on a rear side of the focusing lens in the optical path of the laser light and configured to block a part of the laser light, wherein
- the spatial light modulator includes a liquid crystal layer configured to display the phase pattern,
- the liquid crystal layer includes an effective region in which a part of the laser light entering a pupil plane of the objective lens is incident and a non-effective region in which remainder of the laser light is incident, and
- the slit member blocks light modulated in the non-effective region with a slit.
Dependencies are inferred from the claim text.