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US 11,464,140 B2Granted
Centrally anchored MEMS-based active cooling systems
AssigneeFrore Systems Inc.
InventorsAnanth Saran Yalamarthy, Suryaprakash Ganti, Vikram Mukundan, Seshagiri Rao Madhavapeddy, Prabhu Sathyamurthy, Narayana Prasad Rayapati
Life of this patent
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Abstract
A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.
Claims15
A cooling system, comprising:
- a top plate having at least one vent therein;
- a support structure;
- a cooling element having a first cantilevered region, a second cantilevered region, a central region between the first cantilevered region and the second cantilevered region, and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being between the top plate and a heat-generating structure, forming a top chamber between the cooling element and the top plate;
- and
- an orifice plate having at least one orifice therein, the orifice plate being between the cooling element and the heat-generating structure, the cooling element being between the orifice plate and the top plate, the cooling element configured to undergo vibrational motion of the first cantilevered region and the second cantilevered region when actuated to draw a fluid into the at least one vent, direct the fluid through the top chamber, and drive the fluid through the at least one orifice and toward the heat-generating structure.
2 more elements
A cooling system, comprising
- a support structure;
- a cooling element having a central region and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure;
- a top plate having at least one vent therein, the cooling element being between the top plate and the heat-generating structure, forming a top chamber between the cooling element and the top plate
- wherein the top chamber has a length corresponding to an odd integer multiplied by a wavelength divided by four, the wavelength being an acoustic wavelength for a frequency of the vibrational motion, the frequency of the vibrational motion corresponding to a structural resonance for the cooling element and to an acoustic resonance for the top chamber, the wavelength and the frequency corresponding to the acoustic resonance.
1 more element
A method of cooling a heat-generating structure, comprising:
- driving a cooling element of an active cooling cell to induce a vibrational motion at a frequency, the active cooling cell including a top plate having at least one vent therein, the cooling element, a support structure, and an orifice plate having at least one orifice therein, the cooling element having a first cantilevered region, a second cantilevered region, a central region between the first cantilevered region and the second cantilevered region, and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being between the top plate and a heat-generating structure, forming a top chamber between the cooling element and the top plate, the orifice plate being between the cooling element and the heat-generating structure, the cooling element being between the orifice plate and the top plate, the cooling element being configured to undergo vibrational motion of the first cantilevered region and the second cantilevered region when actuated to draw a fluid into the at least one vent, direct the fluid through the top chamber, and drive the fluid through the at least one orifice and toward a heat-generating structure.
A method of cooling a heat-generating structure, comprising:
- driving a cooling element to induce a vibrational motion at a frequency, the cooling element having a central region and a perimeter, the cooling element being supported by a support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure,
- wherein the frequency corresponds to a structural resonance for the cooling element, the cooling element being between a top plate and the heat-generating structure, the top plate having at least one vent therein, the cooling element and the top plate forming a top chamber between the cooling element and the top plate, the top chamber having a length, the frequency also corresponding to an acoustic resonance having a wavelength corresponding to the length of the top chamber multiplied by four and divided by an odd integer.
Dependencies are inferred from the claim text.