Inorganic TFEL display element and manufacturing
AssigneeLumineq Oy
InventorsHeli Seppänen, Tommy Turkulainen, Kari Härkönen
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Abstract
A method for manufacturing an inorganic thin film electroluminescent display element comprises forming a layer structure, said forming the layer structure comprising forming a first dielectric layer (11); forming a luminescent layer (12), comprising manganese doped zinc sulfide ZnS:Mn, on the first dielectric layer, and forming a second dielectric layer (13) on the luminescent layer. Each of the first and the second dielectric layers are formed so as to comprise nanolaminate with alternating aluminum oxide Al2O3 and zirconium oxide ZrO2 sub-layers.
Claims16
An inorganic thin film electroluminescent display element, comprising a layer structure comprising:
- a first dielectric layer,
- a luminescent layer, comprising manganese doped zinc sulfide ZnS:Mn, on the first dielectric layer, and
- a second dielectric layer on the luminescent layer,
- wherein each of the first and the second dielectric layers comprises nanolaminate with alternating aluminum oxide Al2O3 and zirconium oxide ZrO2 sub-layers,
- wherein zirconium content of the first dielectric layer and/or the second dielectric layer is at least 10% by mass, and
- wherein, in the first dielectric layer and/or the second dielectric layer where the zirconium content is at least 10%, aluminum content is at least 5% by mass.
Dependencies are inferred from the claim text.