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US 11,460,247 B2Granted
Vacuum dryer
AssigneeSamsung Display Co., Ltd.
InventorsJung Wook Lee, Yeon Ju Kwon, Do Hyun Kim, Jung Soo Kim, Ga Hee Park, Ha Jun Song, Do Yoon Lee, Hun Hyeon Im
Life of this patent
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Abstract
A vacuum dryer including a chamber configured to provide an interior space, support pins in the interior space proximate to a bottom of the chamber, a power supply configured to supply power to the support pins, and a pump coupled to the interior space in the chamber.
Claims20
A vacuum dryer comprising:
- a chamber configured to provide an interior space;
- support pins in the interior space proximate to a bottom of the chamber;
- a power supply configured to supply power to the support pins to electrify the support pins;
- and
- a pump coupled to the interior space in the chamber.
2 more elements
Dependencies are inferred from the claim text.