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US 11,459,230 B2Granted
MEMS microphone
AssigneeFortemedia, Inc.
InventorsJien-Ming Chen, Feng-Chia Hsu, Wen-Shan Lin, Hsin-Li Lee, Nai-Hao Kuo
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Abstract
A MEMS microphone includes a substrate, a backplate disposed on a side of the substrate, a diaphragm movably disposed between the substrate and the backplate, and a plurality of slots formed on the diaphragm. The slots are spaced apart from each other and have a non-constant width to relieve the residual stress on the diaphragm.
Claims20
A micro-electro-mechanical system (MEMS) microphone, comprising:
- a substrate;
- a backplate, disposed on a side of the substrate;
- a diaphragm, movably disposed between the substrate and the backplate;
- and
- a plurality of slots formed in an annular area of the diaphragm and spaced apart from each other, wherein the slots have a non-constant width to relieve the residual stress on the diaphragm, and the slots respectively form a main body and an end portion extending from the main body, and the end portion is wider than the main body.
2 more elements
A micro-electro-mechanical system (MEMS) microphone, comprising:
- a substrate;
- a backplate, disposed on a side of the substrate;
- a diaphragm, movably disposed between the substrate and the backplate;
- and
- a plurality of slots formed on the diaphragm, wherein the slots are arranged in concentric circles and have a non-constant width to relieve the residual stress on the diaphragm, wherein the slots respectively form a main body and an end portion extending from the main body, and wherein the end portion is wider than the main body.
2 more elements
Dependencies are inferred from the claim text.