Elastic wave device and manufacturing method thereof
AssigneeMurata Manufacturing Co., Ltd.
InventorKatsuya Matsumoto
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AssigneeMurata Manufacturing Co., Ltd.
InventorKatsuya Matsumoto
Estimating the term…
An elastic wave device includes an IDT electrode on a piezoelectric substrate, in which the IDT electrode includes first electrode fingers and second electrode fingers, where a portion in which the first electrode fingers and the second electrode fingers overlap with each other in an elastic wave propagation direction is defined as an intersection region including in a direction in which the first and second electrode fingers extend, a center region located on a center side and first and second edge regions respectively located on both sides of the center region, in the first and second edge regions, grooves defining recess portions are provided on the piezoelectric substrate, the first and second electrode fingers are provided inside of the grooves as the recess portions and are disposed on the piezoelectric substrate in the grooves.
An elastic wave device comprising:
A manufacturing method of an elastic wave device, the method comprising:
Dependencies are inferred from the claim text.