Light source measurement apparatus

A light source measurement apparatus comprising:

• an objective lens that collects light emitted from a light source having a plurality of light emission points;
• a first reflection attenuation filter that (i) causes a part of light emitted from the objective lens to pass through the first reflection attenuation filter and (ii) reflects another parts of the light emitted from the objective lens;
• a second reflection attenuation filter that (i) causes the part of light having passed through the first reflection attenuation filter to pass through the second reflection attenuation filter and (ii) reflects another part of the light having passed through the first reflection attenuation filter;
• a condensing lens that collects light having passed through the second reflection attenuation filter;
• a space filter disposed at a condensing position of the light collected by the condensing lens;
• and
• a movable stage on which the light source is mounted,
• wherein the first reflection attenuation filter and the second reflection attenuation filter are arranged such that polarization directions of the first reflection attenuation filter and the second reflection attenuation filter are orthogonal to each other,
• wherein the space filter has an opening through which passes light emitted from a measurement target light emission point, the measurement target light emission point being one of the plurality of light emission points, and
• wherein a dimension of the opening in a fast direction of the measurement target light emission point is larger than a dimension of the opening in a slow direction of the measurement target light emission point.