Array substrate, manufacturing method thereof and display panel
AssigneeHkc Corporation Limited
InventorZhenli Song
Life of this patent
Estimating the term…
Abstract
The application discloses an array substrate, a manufacturing method of the array substrate and a display panel. It includes a thin film transistor, and the thin film transistor includes a substrate, a Metal 1, an insulating layer, a semiconductor layer, a barrier layer, a Metal 2, a first passivation layer and a pixel electrode; the Metal 2 includes a source electrode and a drain electrode. A connecting groove is arranged on the barrier layer corresponding to the position of the source electrode and the drain electrode, one end of the connecting groove is connected to the source electrode and the semiconductor layer, and the other end is connected to the drain electrode and the semiconductor layer.
Claims18
An array substrate comprising a thin film transistor,
- and the thin film transistor comprising:
- a substrate;
- a first metal layer disposed on a surface of the substrate;
- an insulating layer covering a surface of the first metal layer;
- a semiconductor layer covering a surface of the insulating layer;
- a barrier layer covering surfaces of the semiconductor layer and the insulating layer;
- a second metal layer covering a surface of the barrier layer, and the second metal layer comprises a source electrode and a drain electrode;
- a first passivation layer covering a surface of the second metal layer;
- a pixel electrode disposed above the first passivation layer;
- wherein, a connecting groove is defined in the barrier layer corresponding to positions of the source electrode and the drain electrode, wherein one end of the connecting groove is connected to the source electrode and the semiconductor layer, and another end of the connecting groove is connected to the drain electrode and the semiconductor layer.
A manufacturing method of an array substrate, comprising:
- providing a first metal hr and an insulating layer on a substrate;
- providing a semiconductor layer and a barrier layer on the insulating layer;
- providing a connecting groove in the barrier layer;
- providing a second metal layer on the barrier layer, wherein the second metal layer comprises a source electrode and a drain electrode;
- providing a first passivation layer on the second metal layer;
- providing a pixel electrode on the first passivation layer;
- and
- providing a contact hole in the first passivation layer that penetrates through the first passivation layer, thus connecting the pixel electrode to the drain electrode of the second metal bar;
- wherein the connecting groove is defined in the barrier layer corresponding to positions of the source electrode and the drain electrode, wherein one end of the connecting groove is connected to the source electrode and the semiconductor layer, and another end of the connecting groove is connected to the drain electrode and the semiconductor layer.
A display panel comprising an array substrate,
- the array substrate comprising a thin film transistor,
- and the thin film transistor comprising:
- a substrate;
- a first metal layer disposed on a surface of the substrate;
- an insulating layer covering a surface of the first metal layer;
- a semiconductor layer covering a surface of the insulating layer;
- a barrier layer covering surfaces of the semiconductor layer and the insulating layer;
- a second metal layer covering a surface of the barrier layer, wherein the second metal layer comprises a source electrode and a drain electrode;
- a first passivation layer covering a surface of the second metal layer;
- a pixel electrode disposed above the first passivation layer;
- wherein, a connecting groove is defined in the barrier layer corresponding to positions of the source electrode and the drain electrode, wherein one end of the connecting groove is connected to the source electrode and the semiconductor layer, and another end of the connecting groove is connected to the drain electrode and the semiconductor layer.
Dependencies are inferred from the claim text.