Semiconductor storage device
AssigneeKioxia Corporation
InventorMasako Kinoshita
Life of this patent
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AssigneeKioxia Corporation
InventorMasako Kinoshita
Estimating the term…
A semiconductor storage device according to one embodiment includes a substrate; a memory cell area having a stacked body where plural electrically conductive layers and plural first insulating layers are stacked alternately one on another, and a pillar portion that penetrates through the stacked body and provides plural memory cells; a peripheral circuit portion that intervenes between the substrate and the memory cell area, and includes a peripheral circuit for plural memory cells; a first plate-like portion that has a frame-like plan view shape and surrounds the peripheral circuit portion, the first plate-like portion being electrically conductive and connected at a lower end thereof to the substrate; a sidewall layer including silicon nitride on a side surface of the first plate-like portion; and a second insulating layer including silicon nitride, the second insulating layer being connected to the sidewall layer and covering above the peripheral circuit portion.
A semiconductor storage device comprising:
A semiconductor storage device comprising:
Dependencies are inferred from the claim text.