Substrate fixing apparatus including a base plate, an electrostatic adsorption member, a plurality of support members on the base plate and supporting the electrostatic adsorption member, and an adhesive layer bonding the electrostatic adsorption member to the base plate

A substrate fixing apparatus comprising:

• a base plate;
• an electrostatic adsorption member that adsorbs and retains a substrate;
• a plurality of support members that are disposed on the base plate to support the electrostatic adsorption member;
• and
• an adhesive layer that adhesively bonds the electrostatic adsorption member to the base plate,
• wherein
• each of the plurality of support members directly contacts the base plate and the electrostatic adsorption member,
• an elastic modulus of each of the plurality of support members is higher than an elastic modulus of the adhesive layer, and
• heights of the plurality of support members are substantially the same.