Measurement method and measuring jig
AssigneeTokyo Electron Limited
InventorsRyusei Kashimura, Masanori Sato, Tetsu Tsunamoto
Life of this patent
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Abstract
In a measurement method, a terminal is brought into contact with an electrode in an electrostatic chuck in contact with a substrate that is grounded. Further, the terminal, the electrostatic chuck and the substrate are fixed, and a current value and a voltage value are measured using an ammeter and a voltmeter, respectively, that are connected to the terminal. In addition, whether or not the terminal and the electrode are electrically connected is determined from a slope of the current value and/or a peak current value based on the measured current value and the voltage value.
Claims10
A measurement method comprising:
- mounting a substrate on an electrostatic chuck;
- supplying a gas into a space above the substrate within a chamber;
- measuring a discharge start voltage value and a current value while a gas discharge is generated in the chamber without generation of plasma;
- calculating an electrostatic capacitance of the electrostatic chuck from the measured discharge start voltage value and the measured current value;
- and
- comparing the calculated electrostatic capacitance of the electrostatic chuck with a predetermined threshold of the electrostatic capacitance and determining a state in the chamber based on the comparison result.
A measurement method comprising:
- mounting a substrate on an electrostatic chuck;
- supplying a gas into a space above the substrate within a chamber;
- and
- measuring a discharge start voltage value and a current value while a gas discharge is generated in the chamber without generation of plasma,
- wherein the electrostatic chuck is divided into multiple zones, and an electrostatic capacitance of each of the multiple zones is calculated,
- wherein the gas discharge is generated by applying a voltage to an electrode disposed in the electrostatic chuck below an edge ring mounted on an edge ring mounting surface of the electrostatic chuck in a state where a base of the electrostatic chuck and the edge ring are in a floating state, and an electrostatic capacitance of the edge ring mounting surface of the electrostatic chuck is calculated.
Dependencies are inferred from the claim text.