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US 11,456,158 B2Granted
Ceramic structure for plasma processing apparatus and manufacturing method thereof
AssigneeKsm Component Co., Ltd.
InventorJoo Hwan Kim
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Abstract
A ceramic structure including a first conductive structure embedded therein and a second conductive structure embedded at a different depth from the first conductive structure is disclosed. In the ceramic structure, the first conductive structure and the second conductive structure are electrically connected to each other by an electrically conductive connection member capable of compensating for a vertical shrinkage rate of a ceramic sheet shape while being embedded therein when sintering the ceramic structure.
Claims20
A manufacturing method of a ceramic structure comprising:
- (a) forming a ceramic sheet shape of a first layer;
- (b) forming a first conductive structure on the ceramic sheet shape of the first layer;
- (c) forming a ceramic sheet shape of a second layer on the first conductive structure;
- (d) embedding an electrically conductive connection member capable of compensating for a vertical shrinkage rate of the ceramic sheet shape in the ceramic sheet shape of the second layer;
- (e) forming a second conductive structure on the ceramic sheet shape of the second layer;
- (f) forming a ceramic sheet shape of a third layer on the second conductive structure;
- and
- (g) sintering a ceramic sheet-shaped laminate manufactured in step (f),
- wherein the ceramic structure includes a structure in which the first conductive structure and the second conductive structure are electrically connected to each other by the electrically conductive connection member capable of compensating for the vertical shrinkage rate of the ceramic sheet shape.
6 more elements
A ceramic structure comprising:
- a first conductive structure embedded therein;
- and
- a second conductive structure embedded at a different depth from the first conductive structure,
- wherein the first conductive structure and the second conductive structure are electrically connected to each other by an electrically conductive connection member compensating for a vertical shrinkage rate of the ceramic sheet shape while being embedded therein when sintering the ceramic structure.
1 more element
Dependencies are inferred from the claim text.