Charged particle beam apparatus

A charged particle beam apparatus, comprising:

• a stage on which an object irradiated with a charged particle beam is to be placed, the stage being configured to move;
• a chamber for storing the stage;
• an emission source of the charged particle beam;
• an electronic optical system configured to emit the charged particle beam from the emission source to the stage;
• an optical column including the emission source and the electronic optical system;
• a charged particle detector configured to detect a position of the charged particle beam irradiated from the electronic optical system;
• a first actuator configured to provide a frequency vibration to the stage based on a first excitation signal;
• a second actuator configured to provide a frequency vibration to the optical column based on a second excitation signal;
• a third actuator configured to provide a frequency vibration to the chamber based on a third excitation signal;
• and
• a controller configured to generate the first to the third excitation signals.