Back to results
US 11,456,149 B2Granted
Methods and systems for acquiring 3D diffraction data
AssigneeFEI Company
InventorsBart Buijsse, Alexander Henstra, Yuchen Deng
Life of this patent
Estimating the term…
Abstract
Diffraction patterns of a sample at various tilt angles are acquired by irradiating a region of interest using a first charged particle beam. Sample images are acquired by irradiating the region of interest using a second charged particle beam. The first and second charged particle beams are formed by splitting charged particles generated by a charged particle source.
Claims19
A method for imaging a sample with charged particle beams, comprising:
- splitting a charged particle beam generated from a charged particle source into a first charged particle beam and a second charged particle beam;
- acquiring a diffraction pattern by irradiating a region of interest (ROI) of the sample with the first charged particle beam;
- and
- acquiring a sample image by irradiating the ROI with a second charged particle beam.
1 more element
A method for imaging a sample with charged particle beams, comprising:
- acquiring a first diffraction pattern and a first sample image by simultaneously irradiating a region of interest (ROI) with a first charged particle beam and a second charged particle beam, wherein the first diffraction pattern is acquired by irradiating the ROI with the first charge particle beam and the first sample image is acquired by irradiating the ROI with the second charged particle beam, and wherein the first charged particle beam and the second charged particle beam are formed by splitting a charged particle beam generated by a charged particle source.
A system for imaging a sample, comprising:
- an optical column including a charged particle source and a bifocal beamformer, wherein the bifocal beam former splits a charged particle beam generated from the charged particle source into a first charged particle beam and a second charged particle beam;
- a sample positioned in a sample chamber coupled to the optical column;
- a detector positioned downstream of the sample;
- and
- a controller with computer readable instructions stored in a non-transitory memory, the controller is configured to:
- irradiate a region of interest (ROI) of the sample with the first charged particle beam and acquire a diffraction pattern with the detector;
- and
- irradiate the ROI with the second charged particle beam and acquire a sample image with the detector.
5 more elements
Dependencies are inferred from the claim text.