Imprint apparatus, imprinting method, and manufacturing method of article

An imprint apparatus for forming a pattern of an imprint material on a plurality of shot areas of a substrate by using a mold having a pattern region, the imprint apparatus comprising:

• a first irradiation unit that irradiates the substrate with irradiation light capable of solidifying the imprint material;
• and
• a second irradiation unit configured to irradiate the substrate with selective irradiation light having intensity distribution over a region along a periphery of a shot area of the substrate and capable of increasing viscosity of the imprint material;
• and
• a control unit that controls light irradiation on the shot area of the substrate by the first irradiation unit and the second irradiation unit,
• wherein the control unit performs control to set an irradiation condition of the second irradiation unit used for irradiating a second shot area of the substrate that is different from a first shot area of the substrate with the selective irradiation light based on a detection result obtained by detecting the first shot area in which a pattern is formed and including at least one of information of an extrusion of the imprint material and an unfilling of the imprint material.