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US 11,454,895 B2Granted
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade
Life of this patent
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Abstract
A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of an electronic component such as a thin film electronic component. The planarization layer may be provided in multiple sub layers. The planarization layer may smooth over roughness caused by removal of material from a blank to form burls on the substrate holder.
Claims20
A substrate holder comprising:
- a main body having a first surface on one side of the main body and a second surface on an opposite side of the main body;
- a plurality of first burls projecting from the first surface and having end surfaces to support a substrate;
- a plurality of second burls projecting from the second surface and having end surfaces to support the main body on a structure;
- a temperature sensor in or on the main body;
- and
- a layer on at least part of the first surface, the layer formed of a carbon-based material,
- wherein the main body has a thickness in the range of about 20 mm to about 50 mm.
4 more elements
A substrate holder comprising:
- a main body having a first surface on one side of the main body and a second surface on an opposite side of the main body;
- a plurality of first burls projecting from the first surface and having end surfaces to support a substrate;
- a plurality of second burls projecting from the second surface and having end surfaces to support the main body on a structure;
- and
- a layer on at least part of the first surface, the layer formed of a carbon-based material;
- and
- an electronic or electric component provided on an external surface of the main body,
- wherein a total area of the plurality of first burls is less than about 1% of a total external surface area of the first surface.
5 more elements
A substrate holder comprising:
- a main body having a first surface on one side of the main body and a second surface on an opposite side of the main body;
- a plurality of first burls projecting from the first surface and having end surfaces to support a substrate;
- a plurality of second burls projecting from the second surface and having end surfaces to support the main body on a structure;
- a temperature sensor in or on the main body;
- and
- a layer on at least part of the first surface, the layer formed of a carbon-based material,
- wherein the main body comprises material selected from:
- SiC, SiSiC, Si3N4, quartz, ceramic or glass ceramic.
5 more elements
Dependencies are inferred from the claim text.