Substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device
AssigneeHoya Corporation
InventorsHirofumi Kozakai, Takahiro Onoue
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Abstract
Provided is a substrate with multilayer reflective film used to manufacture a reflective mask having a multilayer reflective film having high reflectance with respect to exposure light and little film stress. The substrate with multilayer reflective film is provided with a multilayer reflective film for reflecting exposure light, the substrate with multilayer reflective film comprising a multilayer film obtained by building up an alternating stack of low refractive index layers and high refractive index layers on a substrate, and the multilayer reflective film contains krypton (Kr).
Claims19
A substrate with multilayer reflective film comprising:
- a substrate;
- and
- on the substrate, a multilayer reflective film configured to reflect exposure light, the multilayer reflective film comprising a stack of layers, the stack comprising low refractive index layers alternating with high refractive index layers,
- wherein the multilayer reflective film contains krypton (Kr).
A reflective mask blank comprising:
- a substrate;
- on the substrate, a multilayer reflective film configured to reflect exposure light, the multilayer reflective film comprising a stack of layers, the stack comprising low refractive index layers alternating with high refractive index layers;
- and
- an absorber film on the multilayer reflective film,
- wherein the multilayer reflective film contains krypton (Kr).
A reflective mask comprising:
- a substrate;
- on the substrate, a multilayer reflective film configured to reflect exposure light, the multilayer reflective film comprising a stack of layers, the stack comprising low refractive index layers alternating with high refractive index layers;
- and
- an absorber pattern on the multilayer reflective film,
- wherein the multilayer reflective film contains krypton (Kr).
Dependencies are inferred from the claim text.