Laminated lens structure and method of manufacturing the same, and electronic apparatus
AssigneeSony Semiconductor Solutions Corporation
InventorsAtsushi Yamamoto, Kaori Takimoto
Life of this patent
Estimating the term…
Abstract
To make it possible to restrain generation of chipping or cracking in a substrate of a laminated lens structure. A laminated lens structure includes substrates with lens which each have a lens disposed inside a through-hole formed in the substrate and which are laminated on one another by direct bonding, in which the substrates are each provided in the vicinity of the outer circumference thereof with through grooves penetrating the substrate. The present technology is applicable, for example, to a compound eye camera module.
Claims21
A stacked lens substrate comprising:
- a first lens substrate including a first lens in a first through-hole;
- a second lens substrate including a second lens in a second through-hole, wherein the second lens substrate is stacked on the first lens substrate;
- and
- groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view, wherein the first lens substrate is directly bonded to the second lens substrate, wherein a first layer is formed on the first lens substrate and a second layer is formed on the second lens substrate, and wherein each of the first and second layers include one or more of an oxide, nitride material, or carbon.
A stacked lens substrate, comprising:
- a first lens substrate including a first lens in a first through-hole;
- a second lens substrate including a second lens in a second through-hole, wherein the second lens substrate is stacked on the first lens substrate, and
- groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view, and wherein an anti-reflection film is located in the first through-hole and the second through-hole.
A stacked lens substrate, comprising:
- a first lens substrate including a first lens in a first through-hole;
- a second lens substrate including a second lens in a second through-hole, wherein the second lens substrate is stacked on the first lens substrate;
- and
- groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view, and wherein an inner void of a groove portion includes resin.
A method of manufacturing a stacked lens structure, the method comprising:
- disposing a first lens in a first through-hole of a first lens substrate;
- disposing a second lens in a second through-hole of a second lens substrate;
- stacking the first lens substrate on the second lens substrate;
- forming groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view;
- and
- dicing the stacked substrates along dicing lines,
- wherein the through-holes and the groove portions are formed simultaneously.
A method of manufacturing a stacked lens structure, the method comprising:
- disposing a first lens in a first through-hole of a first lens substrate;
- disposing a second lens in a second through-hole of a second lens substrate;
- stacking the first lens substrate on the second lens substrate;
- forming groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view;
- and
- dicing the stacked substrates along dicing lines,
- wherein the groove portions are formed along the dicing lines in regions where the dicing lines in adjacent lens substrates are different from each other,
- wherein the groove portions in one of an odd-numbered lens substrate and an even-numbered lens substrate are formed at intersection regions of the dicing lines, and
- wherein the groove portions in the other of an odd-numbered lens substrate and an even-numbered lens substrate are formed at regions between the intersection regions of the of the dicing lines.
A method of manufacturing a stacked lens structure, the method comprising:
- disposing a first lens in a first through-hole of a first lens substrate;
- disposing a second lens in a second through-hole of a second lens substrate;
- stacking the first lens substrate on the second lens substrate;
- forming groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view;
- dicing the stacked substrates along dicing lines;
- and
- filling an inside of the groove portions with resin simultaneously when forming the first lens.
A method of manufacturing a stacked lens structure, the method comprising:
- bonding a plurality of lens substrates to one another by direct bonding, each lens substrate of the plurality of lens substrates including a lens disposed inside a through-hole formed in the respective lens substrate;
- forming groove portions along dicing lines;
- and
- dicing the plurality of lens substrates along the dicing lines.
An electronic apparatus, comprising:
- a stacked lens substrate, including:
- a first lens substrate including a first lens in a first through-hole,
- a second lens substrate including a second lens in a second through-hole, wherein the second lens substrate is stacked on the first lens substrate, and
- groove portions penetrating the first lens substrate and the second lens substrate in a cross-section view, wherein the first through-hole is disposed between at least two groove portions in a plan view;
- and
- an image sensor corresponding to the first through-hole.
Dependencies are inferred from the claim text.