Method for producing microlens and plasma processing apparatus

A method for producing a microlens, comprising:

• an etching process of, with respect to a target object in which a second organic film having a lens shape is formed on a first organic film formed on a substrate, forming the microlens on the first organic film by etching the first organic film using the second organic film as a mask and using plasma of a first processing gas so as to transfer the lens shape of the second organic film to the first organic film;
• and
• a surface treatment process of smoothing a surface of the microlens formed on the first organic film,
• wherein the surface treatment process includes:
• a deposition process of depositing a predetermined film on the surface of the microlens formed on the first organic film;
• and
• a trimming process of trimming the surface of the microlens on which the predetermined film is deposited,
• wherein the deposition process and the trimming process are alternately performed twice or more for each process in the surface treatment process,
• wherein the deposition process is performed at the beginning of the surface treatment process, and
• wherein the trimming process is performed at the end of the surface treatment process.