Loading patent…
AssigneeTokyo Electron Limited
InventorsKentaro Konishi, Jun Fujihara, Hiroki Shikagawa, Hiroshi Yamada, Yukinori Murata, Katsuaki Sugiyama, Shin Uchida, Tetsuya Kagami, Hiroaki Hayashi, Rika Ozawa, Takanori Hyakudomi, Xingjun Jiang, Kenichi Narikawa, Tomoya Endo
Estimating the term…
A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
A testing system comprising:
Dependencies are inferred from the claim text.