Multifunctional nanoprobes for scanning probe microscopy

A multi-functional scanning probe microscopy nanoprobe comprising:

• a cantilever;
• first and second electrodes formed on a surface of the cantilever from a first material;
• a nanobridge bridging the first and second electrodes;
• and
• a nanopillar formed on the nanobridge;
• wherein either one or both of the nanobridge and the nanopillar is formed from a second material, and one of the first and second materials exhibits ferromagnetism.

A method of fabricating a multi-functional scanning probe microscopy nanoprobe, the method comprising:

• directing a nozzle of a gas injection system at a surface to supply molecules of a first precursor to the surface;
• irradiating the molecules of the first precursor with a focused electron beam to dissociate the molecules of the first precursor into volatile fragments that leave the surface and non-volatile fragments that form a first solid deposit on the surface;
• translating the surface relative to the focused electron beam during said irradiating the molecules of the first precursor to shape the first solid deposit in three dimensions;
• directing a nozzle of the gas injection system at the surface to supply molecules of a second precursor to the surface;
• and
• irradiating the molecules of the second precursor with the focused electron beam to dissociate the molecules of the second precursor into volatile fragments that leave the surface and non-volatile fragments that form a second solid deposit on the first solid deposit;
• wherein one of the first and second solid deposits has greater electrical conductivity and the other exhibits ferromagnetism.