Inertial sensor, electronic instrument, and vehicle
AssigneeSeiko Epson Corporation
InventorSatoru Tanaka
Life of this patent
Estimating the term…
Abstract
An inertial sensor includes a movable element including a first movable section and a second movable section, a first detection electrode, and a first dummy electrode. The first movable section has a first section, a second section that is farther from the swing axis than the first section, and a third section disposed between the first section and second section. The first section of the first movable section has a first opening and the third section of the first movable section has a second opening. An opening ratio of the first opening to the first section of the first movable section is smaller than an opening ratio of the second opening to the third section of the first movable section.
Claims15
An inertial sensor comprising:
- provided that axes X, Y, and Z are three axes perpendicular to one another,
- a substrate;
- a movable element that swings around a swing axis extending along the axis Y;
- and
- an electrode that is disposed on the substrate and overlaps with the movable element in a plan view along the axis-Z direction,
- wherein the movable element includes a first movable section and a second movable section so provided as to sandwich the swing axis in the plan view along the axis-Z direction,
- the first movable section includes a symmetrical section that is so provided that the symmetrical section and the second movable section are symmetrical with respect to the swing axis in the plan view along the axis-Z direction and an asymmetrical section that is farther from the swing axis than the symmetrical section, with rotational moment of the first movable section around the swing axis being greater than rotational moment of the second movable section around the swing axis,
- the electrode includes a first detection electrode that is so provided as to overlap with the symmetrical section of the first movable section in the plan view along the axis-Z direction and a first dummy electrode that is so provided as to overlap with the symmetrical section and the asymmetrical section of the first movable section on a side farther from the swing axis than the first detection electrode and has the same potential as potential at the movable element,
- the symmetrical section has a first opening provided in a first section that overlaps with the first detection electrode in the plan view along the axis-Z direction and a second opening provided in a second section that overlaps with the first dummy electrode in the plan view along the axis-Z direction, and
- an opening ratio of the first opening to the first section is smaller than an opening ratio of the second opening to the second section.
An inertial sensor comprising:
- a substrate;
- a movable element that swings around a swing axis, the movable element including:
- a first movable section having a first section, a second section that is farther from the swing axis than the first section, and a third section disposed between the first section and second section;
- a second movable section;
- a first detection electrode disposed on the substrate so as to overlap with the first section of the first movable section in the plan view;
- a first dummy electrode disposed on the substrate so as to overlap with the second section and the third section of the first movable section in the plan view,
- wherein the first section of the first movable section has a first opening,
- the third section of the first movable section has a second opening, and
- an opening ratio of the first opening to the first section of the first movable section is smaller than an opening ratio of the second opening to the third section of the first movable section.
Dependencies are inferred from the claim text.