Gas sensor, and method for operating the gas sensor

A method for operating a gas sensor, comprising:

• heating a heating element;
• conducting heat via a gas mixture, wherein more heat is conducted from the heating element to a first temperature sensor structure and to a second temperature sensor structure via the gas mixture surrounding the gas sensor than via a membrane,
• wherein the membrane is spread out by a frame made of a carrier material implemented such that a thermal conductivity of the membrane deviates from a thermal conductivity of the carrier material, and
• wherein the heating element is arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane, and the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and the second discontinuation area of the membrane comprises at least one discontinuation of the membrane;
• and
• detecting a heating transfer by means of the first temperature sensor structure and the second temperature sensor structure,
• wherein the first temperature sensor structure is arranged at least partially in or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and
• wherein a second temperature sensor structure is arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element.

A gas sensor, comprising:

• a membrane;
• a heating element arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane,
• wherein the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and wherein the second discontinuation area of the membrane comprises at least one discontinuation of the membrane,
• a first temperature sensor structure arranged at least partially in or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and
• a second temperature sensor structure arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element;
• wherein the first discontinuation area of the membrane comprises a continuous discontinuation whose longitudinal expansion is large enough that it fully covers the area between the first temperature sensor structure and the heating element, and
• wherein the second discontinuation area of the membrane comprises a continuous discontinuation whose longitudinal expansion is large enough that it fully covers the area between the second temperature sensor structure and the heating element.

A gas sensor, comprising:

• a membrane;
• a heating element arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane,
• wherein the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and wherein the second discontinuation area of the membrane comprises at least one discontinuation of the membrane,
• a first temperature sensor structure arranged at least partially in or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and
• a second temperature sensor structure arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element;
• wherein a lateral expansion of the discontinuation of the first discontinuation area differs from a lateral expansion of the discontinuation of the second discontinuation area.

A gas sensor, comprising:

• a membrane;
• a heating element arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane,
• wherein the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and wherein the second discontinuation area of the membrane comprises at least one discontinuation of the membrane,
• a first temperature sensor structure arranged at least partially in 5 or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and
• a second temperature sensor structure arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element;
• wherein the first temperature sensor structure comprises a different distance to the heating element than the second temperature sensor structure.

A gas sensor, comprising:

• a membrane;
• a heating element arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane,
• wherein the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and wherein the second discontinuation area of the membrane comprises at least one discontinuation of the membrane,
• a first temperature sensor structure arranged at least partially in or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and
• a second temperature sensor structure arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element;
• wherein a distance between the discontinuations in the first discontinuation area and a distance between the discontinuations in the second discontinuation area correspond to the smallest realizable structural width resulting in a mechanically durable grid structure.

A gas sensor, comprising:

• a membrane;
• a heating element arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane, wherein the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and wherein the second discontinuation area of the membrane comprises at least one discontinuation of the membrane, a first temperature sensor structure arranged at least partially in or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and a second temperature sensor structure arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element;
• wherein the first discontinuation area and the second discontinuation area each comprise several discontinuations arranged in a grid structure in which the discontinuations are arranged in rows in parallel to the heating element and the rows are arranged offset to each other.

A gas sensor, comprising:

• a membrane;
• a heating element arranged in or on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane, wherein the first discontinuation area of the membrane comprises at least one discontinuation of the membrane, and wherein the second discontinuation area of the membrane comprises at least one discontinuation of the membrane, a first temperature sensor structure arranged at least partially in or on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element;
• and
• a second temperature sensor structure arranged at least partially in or on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element;
• wherein the first discontinuation area and the second discontinuation area comprise several discontinuations arranged in a grid structure such that all available paths of heat conduction through the membrane are longer than a direct path.