Image forming method and impedance microscope
OwnerToshihiko Ogurainventor
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Abstract
An image forming method includes: arranging a sample between a first main surface of an insulating thin film and a counter electrode, measuring an impedance value by inputting an AC potential signal to the counter electrode, scanning a physical beam while focusing and irradiating a conductive thin film given to cover a second main surface of the insulating thin film with the physical beam to lower an insulation property of the insulating thin film directly below an irradiation position, guiding the AC potential signal to the irradiation position, and forming an image from the impedance value corresponding to the irradiation position.
Claims19
A method of forming an image of a sample, the method comprising:
- applying an AC potential signal to a counter electrode, wherein the sample is located between a first main surface of an insulating thin film and the counter electrode;
- irradiating and scanning a conductive thin film disposed on a second main surface of the insulating thin film with a physical beam to form a localized region of the insulating thin film in which an insulation property is lowered;
- acquiring an output signal associated with the AC potential signal guided to the conductive thin film via the localized region;
- measuring an impedance value corresponding to the localized region based on the output signal;
- and
- forming the image of the sample based on the impedance value.
An impedance microscope comprising:
- an insulating thin film having a first main surface and a second main surface;
- a counter electrode facing the first main surface of the insulating thin film;
- a conductive thin film disposed on the second main surface of the insulating thin film;
- a physical beam irradiator to irradiate and scan the conductive thin film with a physical beam to form a localized region of the insulating thin film in which an insulation property is lowered;
- and
- a function generator electrically connected to the counter electrode and configured to apply an AC potential signal to the counter electrode,
- wherein the impedance microscope is configured to:
- acquire an output signal associated with the AC potential signal guided to the conductive thin film via the localized region;
- measure an impedance value corresponding to the localized region based on the output signal;
- and
- form an image based on the impedance value.
Dependencies are inferred from the claim text.