Orientation determination and mapping by stage rocking electron channeling and imaging reconstruction
AssigneeNorthwestern University
InventorsVinayak P. Dravid, Benjamin Myers, Karl A. Hujsak
Life of this patent
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Abstract
A system to generate orientation maps includes a measurement system configured to capture a plurality images of a sample and a computing device in operable communication with the measurement system. The computing device is configured to align the plurality of images of the sample and process the aligned plurality of images to detect one or more regions of interest. The computing device is also configured to generate one or more electron channeling patterns (ECPs) corresponding to the sample based on the one or more regions of interest. The computing device is further configured to generate an orientation map of the sample based on the one or more ECPs.
Claims17
A system to generate orientation maps, the system comprising:
- a measurement system configured to capture a plurality of images of a sample;
- and
- a computing device, in operable communication with the measurement system, wherein the computing device is configured to:
- align the plurality of images of the sample;
- process the aligned plurality of images to detect one or more regions of interest;
- generate one or more electron channeling patterns (ECPs) corresponding to the sample based on the one or more regions of interest;
- determine if a quality of the one or more ECPs satisfies a quality threshold, wherein, responsive to a determination that the one or more ECPs do not satisfy the quality threshold, the computing device is configured to capture additional images until the quality threshold is satisfied;
- and
- generate an orientation map of the sample based on the one or more ECPs.
A method for performing orientation mapping, the method comprising:
- capturing, by a measurement system, a plurality of images of a sample;
- capturing, by the measurement system, lattice parameter information for strain analysis by higher-order Laue zone detection;
- aligning, by a computing device in communication with the measurement system, the plurality of images of the sample;
- processing, by the computing device, the aligned plurality of images to detect one or more regions of interest;
- generating, by the computing device, one or more electron channeling patterns (ECPs) corresponding to the sample based on the one or more regions of interest;
- and
- generating, by the computing device, an orientation map of the sample based on the one or more ECPs.
Dependencies are inferred from the claim text.