Micro pressure sensor

A micro pressure sensor comprising:

• a first micro pressure sensor module comprising:
• a first body defining a first compartment and having a single first port defined in a wall of the first body;
• a first membrane attached to a surface of the first body;
• and
• a single first electrically conductive electrode disposed exclusively over a single major surface of the first membrane;
• a second micro pressure sensor module arranged in a stack with the first micro pressure sensor module, the second micro pressure sensor module, comprising:
• a second body defining a second compartment and having a single second port defined in a wall of the second body, which wall opposes the wall having the single first port;
• a second membrane attached to a surface of the second body;
• and
• a single second electrically conductive electrode disposed exclusively on a single major surface of the second membrane, and with the second membrane in combination with the first membrane and the first body enclosing the first compartment and with changes in distance separating adjacent membranes of the plurality of membranes cause changes in capacitance between the corresponding electrode layers on each of the surfaces of the adjacent membranes.

A micro pressure sensor comprises:

• a body having a plurality of walls that define a single chamber;
• a plurality of membranes each having a surface and a single correspond electrode layer disposed exclusively over the surface thereof, the plurality of membranes disposed in the single chamber and anchored between two of the plurality of walls of the body forming plural compartments within the single chamber, with changes in distance separating adjacent membranes of the plurality of membranes cause changes in capacitance between the corresponding electrode layers on each of the surfaces of the adjacent membranes;
• a set of inlets coupled to a first set of the plural compartments, the set of inlets disposed in corresponding portions of a first one of the plurality of walls of the body, with remaining walls of the plurality of walls of the body being a solid portion without any opening in the body;
• and a set of outlets coupled to a second different set of the plural compartments, the set of outlets disposed in corresponding portions of another one of the plurality of walls of the body, with the first one of the plurality of walls of the body and the remaining walls, excluding the another one of the walls, of the plurality of walls of the body being a solid portion without any opening in the body.