Fabry-Perot sensor and method for manufacturing same
AssigneeBeijing Bywave Sensing Science & Technology Development Co., Ltd.
InventorsLizhe Zhang, Chun Lin
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AssigneeBeijing Bywave Sensing Science & Technology Development Co., Ltd.
InventorsLizhe Zhang, Chun Lin
Estimating the term…
Disclosed are a Fabry-Perot sensor and a method for manufacturing the same. A Fabry-Perot sensor including: a base part; a cavity formed between the base part and a pressure-sensitive film, and enclosed by the base part and the pressure-sensitive film; the pressure-sensitive film, fixed to the base part, wherein the pressure-sensitive film has one or more localised areas, each localised area has a doping substance doped into a base material of the pressure-sensitive film to produce stress, no localised area penetrates the entire thickness of the pressure-sensitive film, and under the effect of stress, the pressure-sensitive film has a corrugated structure; an optic fibre used for conducting a light signal, one end part of the optic fibre being fixed to an optic fibre mounting part of the base part, and the optic fibre mounting part being located at an end part of the base part opposite the cavity.
A Fabry-Perot sensor comprising:
A method of manufacturing a Fabry-Perot sensor comprising:
Dependencies are inferred from the claim text.