Method of manufacturing a flow measuring device having a rotatable member patterned within a chamber

Abstract

A method of manufacturing a flow measuring device having a rotatable element includes patterning an adhesive layer disposed on a first surface of a first sheet of a flexible material to remove portions of the adhesive layer in an area to define a location for a rotatable element, patterning the first sheet to define the rotatable element in the first sheet, adhering a pair of membrane layers of a second flexible material, to opposing surfaces of the patterned first sheet, with each of the pair of membrane layers having an electrically conductive layer on a surface thereof, patterning the electrically conductive layer to provide an electrode on each of the pair of membrane layers, and adhering a pair of sealing layers to surfaces of the pair of membrane layers.

Dependencies are inferred from the claim text.