Testing apparatus and testing method
AssigneeSkyverse Technology Co., Ltd.
InventorsLu Chen, Le Yang, Yanzhong Ma, Chaoqian Zhang
Life of this patent
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AssigneeSkyverse Technology Co., Ltd.
InventorsLu Chen, Le Yang, Yanzhong Ma, Chaoqian Zhang
Estimating the term…
Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample (11) to be tested, a first detection apparatus (21) and a second detection apparatus (22) can be switched by means of an objective lens switching apparatus (20), so as to acquire height information and structure information of the sample (11) to be tested. In the process, the sample (11) to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample (11) to be tested avoided, and the probability of the sample (11) to be tested being polluted in the testing process reduced, but also a region to be tested of the sample (11) to be tested does not need to be determined repeatedly, improving the testing speed for the sample (11) to be tested.
A detection apparatus, comprising a carrying platform, a light source device, a first objective, a second objective, an objective lens switching device and a measuring device, wherein:
Dependencies are inferred from the claim text.