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US 11,454,488 B2Granted
Strain gauge with improved stability
AssigneeMINEBEA MITSUMI Inc.
InventorsToshiaki Asakawa, Shinichi Niwa, Yuta Aizawa, Atsushi Kitamura
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Abstract
A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate. The strain gauge includes a resistor formed of a film including Cr, CrN, and Cr2N, on one surface of the functional layer. The substrate has an expansion coefficient in a range of from 7 ppm/K to 20 ppm/K.
Claims11
A strain gauge comprising:
- a flexible resin substrate;
- a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate;
- and
- a resistor formed of a film that includes Cr, CrN, and Cr2N and into which an element included in the functional layer is diffused, on one surface of the functional layer,
- wherein a gauge factor of the strain gauge is 10 or more, and
- wherein the substrate has an expansion coefficient of the strain gauge in a range of from 7 ppm/K to 20 ppm/K.
3 more elements
A strain gauge comprising:
- a flexible resin substrate;
- a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate;
- and
- a resistor formed of a film that includes Cr, CrN, and Cr2N and into which an element included in the functional layer is diffused, on one surface of the functional layer,
- wherein a temperature coefficient of resistance of the strain gauge is in a range of from −1000 ppm/° C. to +1000 ppm/° C., and
- wherein the substrate has an expansion coefficient in a range of from 7 ppm/K to 20 ppm/K.
3 more elements
A strain gauge comprising:
- a flexible resin substrate;
- a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate;
- and
- a resistor formed of a film including Cr, CrN, and Cr2N, on one surface of the functional layer,
- wherein the substrate has an expansion coefficient in a range of from 7 ppm/K to 20 ppm/K.
2 more elements
Dependencies are inferred from the claim text.