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US 11,454,336 B1Granted
Support device of vacuum pipe
AssigneeUb Eng Co., Ltd.
InventorSe Hwan Jang
Life of this patent
Estimating the term…
Abstract
According to an embodiment of the present invention, since the vibration transmitted from the vacuum pipe can be reduced according to the movement of the mass, even anti-vibration effect can be expected regardless of the size of the pipe, the characteristics of the fluid or the like and the vibration prevention effect can be improved by further increasing the vibration transmission area by the elasticity of the press member.
Claims7
A support device of a vacuum pipe used in the working environment of a semiconductor or display device having a multilayered structure, comprising:
- a housing, through which the vacuum pipe passes and which is coupled to at least one layer of a plurality of layers of the multilayered structure so as to support the vacuum pipe and has an accommodation space formed therein;
- and
- a vibration prevention member provided in the accommodation space of the housing so as to reduce vibration of the vacuum pipe, wherein the vibration prevention member comes into contact with the vacuum pipe so as to reduce the vibration of the vacuum pipe,
- the vibration prevention member includes:
- a support member disposed in the accommodation space;
- and
- a buffer member, which is coupled to the support member and has a mass accommodated in a sealed inner space thereof so as to dampen the vibration transmitted from the vacuum pipe,
- wherein the mass moves by inertia in the opposite direction to the moving direction of the vacuum pipe so as to cushion the vibration of the vacuum pipe.
5 more elements
Dependencies are inferred from the claim text.