DNA sequencing with stacked nanopores
AssigneeInternational Business Machines Corporation
InventorsZhenxing Bi, Kangguo Cheng, Juntao Li, Xin Miao
Life of this patent
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Abstract
A method for fabricating a stacked nanopore includes forming a stack of layers having alternating conductive lines and dielectric layers on a substrate, and patterning the stack to form a staircase structure with the conductive lines having a length gradually changing at each level in the stack. The method also includes depositing and planarizing a dielectric material over the staircase structure, forming contacts through the dielectric material to the conductive lines for each level of conductive lines, etching a nanopore through the stack of layers to form pairs of opposing electrodes across the nanopore using the conductive lines; and opening up the substrate to expose the nanopore.
Claims20
A method for fabricating a stacked nanopore, comprising:
- forming a stack of layers having alternating conductive lines and dielectric layers on a substrate;
- patterning the stack to form a staircase structure with the conductive lines having a length gradually changing at each level in the stack;
- depositing and planarizing a dielectric material over the staircase structure;
- forming contacts through the dielectric material to the conductive lines for each level of conductive lines;
- etching a nanopore through the stack of layers to form pairs of opposing electrodes across the nanopore using the conductive lines;
- and
- opening up the substrate to expose the nanopore.
A method for fabricating a stacked nanopore, comprising:
- forming a plurality of alternating conductive lines and dielectric layers in a stack on a substrate;
- patterning the stack to form a tapered structure with the conductive lines having a length gradually changing at each level in the stack;
- depositing a dielectric material over the tapered structure;
- forming contacts through the dielectric material to the conductive lines for each level of conductive lines;
- and
- etching a nanopore through the stack of layers to form pairs of opposing electrodes across the nanopore using the conductive lines.
Dependencies are inferred from the claim text.