Dialkylzinc- and dialkylzinc partial hydrolysate-containing solution, and method for producing zinc oxide thin film using solution
AssigneeTosoh Finechem Corporation
InventorsKouji Toyota, Kenichi Haga
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Abstract
A solution containing a diketone compound having an alkoxy group, a dialkylzinc represented by general formula (1) and/or a partial hydrolysate of the dialkylzinc, and a solvent is described. A method for producing a zinc oxide thin film involves applying the dialkylzinc solution or a solution containing a dialkylzinc partial hydrolysate to a base material. ZnR102 (1) In the formula, R10 is a C1-6 linear or branched alkyl group. The solution containing dialkylzinc or dialkylzinc partial hydrolysate can be handled in air, making it possible to form a transparent thin film having high adhesiveness to a substrate even with film formation in air.
Claims13
A solution consisting essentially of a diketone compound having an alkoxy group, a dialkylzinc represented by formula (1) below and/or a partial hydrolysate of the dialkylzinc, and a solvent,
- wherein the solvent is at least one solvent selected from the group consisting of aliphatic hydrocarbons, alicyclic hydrocarbons, aromatic hydrocarbons, hydrocarbon solvents, ether compounds, linear amide compounds and cyclic amide compounds,
- a molar ratio of the diketone compound having an alkoxy group contained in the solution to zinc in the dialkylzinc or the partial hydrolysate of the dialkylzinc is 0.01 to 2,
- ZnR102 (1)
- wherein in the formula (1), R10 is a C1-C6 linear or branched alkyl group.
Dependencies are inferred from the claim text.