Patterned stamp manufacturing method, patterned stamp imprinting method and imprinted article

An imprint lithography method of forming a patterned contoured surface on a non-planar receiving surface, the method comprising:

• providing a pattern precursor layer over the receiving surface;
• imprinting the pattern precursor layer with a patterned stamp,
• wherein the patterned stamp comprises a support layer and a first layer supported by the support layer,
• wherein the first layer comprises a contoured stamp surface carrying a pattern of relief features,
• wherein the contoured stamp surface corresponds to a contour of the non-planar receiving surface,
• wherein the support layer varies in thickness to conform to the non-planar contour,
• wherein the support layer comprises a different material than the first layer,
• wherein the first layer comprises a rubber-like layer having a first Young's modulus,
• wherein the support layer comprises a rubber-like layer having a second Young's modulus, and
• wherein the first Young's modulus is equal to or larger than the second Young's modulus;
• developing the pattern precursor layer into a pattern layer on the non-planar receiving surface;
• and
• removing the patterned stamp from the developed pattern layer.

A method comprising:

• providing a pliable stamp layer comprising a pattern of relief structures;
• forming the stamp layer over a non-planar receiving surface;
• wherein the stamp layer is formed to have a contour corresponding to a contour of the non-planar receiving surface;
• depositing a fluid precursor material upon the stamp layer;
• solidifying the precursor material to form a support layer on the stamp layer;
• adhering the support layer to the stamp layer to form a patterned stamp;
• and
• removing the patterned stamp from the receiving surface to enable use of the patterned stamp for imprinting a complementary pattern of relief surfaces on a corresponding non-planar object.

A method comprising:

• providing a patterned stamp;
• wherein the patterned stamp includes a contoured stamp surface upon a support layer;
• wherein the contoured stamp surface corresponds to a contour of a non-planar receiving surface of an object,
• wherein the support layer varies in thickness to conform to the non-planar contour,
• wherein the contoured stamp surface comprises a pattern of relief surfaces;
• providing a precursor material upon the receiving surface of the object;
• applying the patterned stamp to the precursor material to imprint the precursor material with a complement of the pattern of relief surfaces on the non-planar stamp surface.