Stacked PLV driver architecture for a microelectromechanical system spatial light modulator

A spatial light modulator (SLM) comprising:

• a two-dimensional (2D) array of pixels arranged over a surface of a substrate including at least n rows of m pixels, each pixel including at least one modulator configured to modulate light incident thereon;
• and
• a stacked drive circuit comprising 1D array of drivers including n*m drivers arranged in a single row adjacent to the 2D array of pixels and having a long axis parallel to the n rows of the 2D array of pixels,
• wherein each driver in the 1D array of drivers is electrically coupled to at least one pixel through an interconnect arm and configured to provide a drive signal to modulate light reflected from the pixel, and wherein each driver in the 1D array of drivers other than a last driver in the 1D array of drivers most distal from the 2D array of pixels is further electrically coupled to a load balance arm extending towards the last driver in a direction parallel to the long axis of the 1D array of drivers.