Vibration device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKentaro Usui, Junichi Hashimoto, Yuhei Yamagishi
Life of this patent
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Abstract
The vibration device includes a diaphragm, and a plurality of piezoelectric films that are arranged at predetermined intervals in a first direction of the diaphragm to face the diaphragm and extend parallel to a second direction orthogonal to the first direction. The diaphragm has at least one slit formed therein and dividing the diaphragm into respective regions. Each of the piezoelectric films are fixed to a respective region of the diaphragm while extending along the second direction in a tensioned state. The piezoelectric films expand and contract in a plane direction when a voltage is applied thereto.
Claims17
A vibration device comprising:
- a diaphragm having at least one slit which extends in a first direction and divides the diaphragm into a plurality of regions, none of the regions of the diaphragm being flat;
- and
- a plurality of piezoelectric films that are arranged at predetermined intervals in a second direction, which is orthogonal to the first direction, so as to face the diaphragm and extend parallel the first direction, the piezoelectric films being fixed to the diaphragm while extending along the first direction in a tensioned state and expanding and contracting in a plane direction when a voltage is applied thereto.
Dependencies are inferred from the claim text.