# US 11,452,204 B2 · Ceramic circuit board, method for manufacturing ceramic circuit board, and module using ceramic circuit board

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- Number: US 11,452,204 B2
- Document ID: US11452204B2
- Status: Granted
- Kind: B2
- Application number: 16/606,405
- Filed: 2018-04-24
- Published: 2020-04-23
- Granted: 2022-09-20
- Earliest claimed: 2017-04-25
- Assignees: Denka Company Limited
- Applicants: Denka Company Limited
- Inventors: Yusaku Harada; Akimasa Yuasa; Takahiro Nakamura; Shuhei Morita; Kouji Nishimura
- Web page: https://patentgrep.com/patent/US11452204B2

## CPC

- H05K 1/0306: {Inorganic insulating substrates, e.g. ceramic, glass}
- C04B 37/026: {consisting of metals or metal salts}
- H10W 40/10: Arrangements for heating
- H10W 40/255: {having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates}
- H10W 70/60: Insulating or insulated package substrates; Interposers; Redistribution layers (leadframes H10W70/40)
- H10W 90/00: Package configurations
- C04B 2235/6562: Heating rate
- C04B 2235/6567: Treatment time
- C04B 2235/658: Atmosphere during thermal treatment
- C04B 2235/77: Density
- C04B 2237/124: based on copper
- C04B 2237/125: based on noble metals, e.g. silver
- C04B 2237/126: wherein the active component for bonding is not the largest fraction of the interlayer
- C04B 2237/366: Aluminium nitride
- C04B 2237/368: Silicon nitride
- C04B 2237/407: Copper
- C04B 2237/60: Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface
- C04B 2237/708: of one or more of the interlayers
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A ceramic circuit substrate and power module with excellent heat cycle resistance characteristics, which is formed by bonding a ceramic substrate and a copper plate via a brazing material including Ag, Cu, and an active metal, wherein the bond void fraction is no greater than 1.0% and the diffusion distance of the Ag, which is a brazing material component, is 5-20 μm. Also, a method for manufacturing a ceramic circuit substrate characterized in that the heating time in a temperature range 400-700° C. in a process for raising the temperature to a bonding temperature is 5-30 minutes and bonding is performed by maintaining the bonding temperature at 720-800° C. for 5-30 minutes.

## Claims

### Claim 1

A ceramic circuit substrate comprising a ceramic substrate bonded with a copper plate via a brazing material comprising Ag, Cu, and an active metal,
wherein a bond void fraction is no greater than 1.0%, and
a diffusion distance between a surface of the ceramic substrate, which is in contact with the brazing material, and a maximum point at which the Ag diffuses in a copper plate thickness direction from the surface of the ceramic substrate into the copper plate is 5-20 μm.

### Claim 2 (depends on 1)

The ceramic circuit substrate according to claim 1, wherein the ceramic substrate comprises silicon nitride or aluminum nitride.

### Claim 3 (depends on 1)

The ceramic circuit substrate according to claim 1, wherein the brazing material comprises Sn.

### Claim 4 (depends on 1)

A manufacturing method for the ceramic circuit substrate according to claim 1, wherein a heating time in a temperature range 400-700° C. in a process for raising the temperature to a bonding temperature is 5-30 minutes and bonding is performed by maintaining the bonding temperature at 720-800° C. for 5-30 minutes.

### Claim 5 (depends on 4)

The manufacturing method for a ceramic circuit substrate according to claim 4, further comprising bonding in a continuous heating furnace in a nitrogen atmosphere.

### Claim 6 (depends on 1)

A power module using the ceramic circuit substrate according to claim 1.

### Claim 7 (depends on 2)

The ceramic circuit substrate according to claim 2, wherein the brazing material comprises Sn.

### Claim 8 (depends on 2)

A manufacturing method for the ceramic circuit substrate according to claim 2, wherein a heating time in a temperature range 400-700° C. in a process for raising the temperature to a bonding temperature is 5-30 minutes and bonding is performed by maintaining the bonding temperature at 720-800° C. for 5-30 minutes.

### Claim 9 (depends on 3)

A manufacturing method for the ceramic circuit substrate according to claim 3, wherein the heating time in a temperature range 400-700° C. in a process for raising the temperature to a bonding temperature is 5-30 minutes and bonding is performed by maintaining the bonding temperature at 720-800° C. for 5-30 minutes.

### Claim 10 (depends on 7)

A manufacturing method for the ceramic circuit substrate according to claim 7, wherein a heating time in a temperature range 400-700° C. in a process for raising the temperature to a bonding temperature is 5-30 minutes and bonding is performed by maintaining the bonding temperature at 720-800° C. for 5-30 minutes.

### Claim 11 (depends on 8)

The manufacturing method for a ceramic circuit substrate according to claim 8, further comprising bonding in a continuous heating furnace in a nitrogen atmosphere.

### Claim 12 (depends on 9)

The manufacturing method for a ceramic circuit substrate according to claim 9, further comprising bonding in a continuous heating furnace in a nitrogen atmosphere.

### Claim 13 (depends on 10)

The manufacturing method for a ceramic circuit substrate according to claim 10, further comprising bonding in a continuous heating furnace in a nitrogen atmosphere.

### Claim 14 (depends on 2)

A power module using the ceramic circuit substrate according to claim 2.

### Claim 15 (depends on 3)

A power module using the ceramic circuit substrate according to claim 3.

### Claim 16 (depends on 7)

A power module using the ceramic circuit substrate according to claim 7.
