# US 11,451,167 B2 · Vibration-driven energy harvesting device and vibration-driven energy harvester > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,451,167 B2 - Document ID: US11451167B2 - Status: Granted - Kind: B2 - Application number: 17/058,328 - Filed: 2019-05-27 - Published: 2021-07-15 - Granted: 2022-09-20 - Earliest claimed: 2018-05-31 - Assignees: The University of Tokyo; Kabushiki Kaisha Saginomiya Seisakusho - Applicants: The University of Tokyo; Saginomiya Seisakusho, Inc. - Inventors: Hiroshi Toshiyoshi; Hisayuki Ashizawa; Masahiro Morita - Web page: https://patentgrep.com/patent/US11451167B2 ## CPC - H02N 1/08: with conductive charge carrier, i.e. capacitor machines - B81B 3/00: Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract A vibration-driven energy harvesting device includes: a first vibration-driven energy harvesting assembly constituted with a first fixed comb tooth portion and a first movable comb tooth portion that are interdigitated with each other; a second vibration-driven energy harvesting assembly constituted with a second fixed comb tooth portion and a second movable comb tooth portion that are interdigitated with each other; a first output electrode connected to the first vibration-driven energy harvesting assembly; and a second output electrode connected to the second vibration-driven energy harvesting assembly, wherein: an output of the first vibration-driven energy harvesting assembly is different from an output of the second vibration-driven energy harvesting assembly. ## Claims ### Claim 1 A vibration-driven energy harvesting device, comprising: a first vibration-driven energy harvesting assembly constituted with a first fixed comb tooth portion and a first movable comb tooth portion that are interdigitated with each other; a second vibration-driven energy harvesting assembly constituted with a second fixed comb tooth portion and a second movable comb tooth portion that are interdigitated with each other; a first output electrode connected to the first vibration-driven energy harvesting assembly; and a second output electrode connected to the second vibration-driven energy harvesting assembly, wherein the first fixed comb tooth portion and the second fixed comb tooth portion are arranged laterally adjacent to one another in a direction perpendicular to a direction of movement of the first and second movable comb tooth portions, and during operation of the vibration-driven energy harvesting device an electrical output of the first vibration-driven energy harvesting assembly is different from an electrical output of the second vibration-driven energy harvesting assembly. ### Claim 2 (depends on 1) The vibration-driven energy harvester used in the vibration-driven energy harvesting device according to claim 1, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: comb teeth included in the first fixed comb tooth portion and the second fixed comb tooth portion are each electrically insulated, with the first output electrode connected to the first fixed comb tooth portion and the second output electrode connected to the second fixed comb tooth portion, or comb teeth included in the first movable comb tooth portion and the second movable comb tooth portion are each electrically insulated, with the first output electrode connected to the first movable comb tooth portion and the second output electrode connected to the second movable comb tooth portion. ### Claim 3 (depends on 2) The vibration-driven energy harvester according to claim 2, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a total quantity of comb teeth included in the first fixed comb tooth portion and the first movable comb tooth portion is different from a total quantity of comb teeth included in the second fixed comb tooth portion and the second movable comb tooth portion. ### Claim 4 (depends on 2) The vibration-driven energy harvester according to claim 2, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a comb tooth height of at least either of the first fixed comb tooth portion and the first movable comb tooth portion, which are interdigitated with each other, is different from a comb tooth height of the second fixed comb tooth portion and the second movable comb tooth portion, which are interdigitated with each other. ### Claim 5 (depends on 2) The vibration-driven energy harvester according to claim 2, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a distance between comb teeth in the first fixed comb tooth portion and the first movable comb tooth portion, which are interdigitated with each other, is different from a distance between comb teeth in the second fixed comb tooth portion and the second movable comb tooth portion, which are interdigitated with each other. ### Claim 6 (depends on 2) The vibration-driven energy harvester according to claim 2, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a comb tooth length of the second fixed comb tooth portion or the second movable comb tooth portion is set smaller than a comb tooth length of the first fixed comb tooth portion and the first movable comb tooth portion, and the second fixed comb tooth portion and the second movable comb tooth portion are set to be a non-interdigitated state when no vibration is occurring. ### Claim 7 (depends on 2) The vibration-driven energy harvester according to claim 2, wherein: electrets are formed at at least either of comb teeth in the first vibration-driven energy harvesting assembly and comb teeth in the second vibration-driven energy harvesting assembly that are interdigitated with each other. ### Claim 8 (depends on 1) The vibration-driven energy harvester used in the vibration-driven energy harvesting device according to claim 1, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: the first fixed comb tooth portion and the second fixed comb tooth portion are electrically insulated, with the first output electrode connected to the first fixed comb tooth portion and the second output electrode connected to the second fixed comb tooth portion, or the first movable comb tooth portion and the second movable comb tooth portion are electrically insulated, with the first output electrode connected to the first movable comb tooth portion and the second output electrode connected to the second movable comb tooth portion. ### Claim 9 (depends on 8) The vibration-driven energy harvester according to claim 8, wherein: at least either of the first fixed comb tooth portion and the second fixed comb portion, which are electrically insulated from each other, includes at least two electrically insulated fixed comb tooth groups, or at least either of the first movable comb tooth portion and the second movable comb tooth portion, which are electrically insulated from each other, includes at least two electrically insulated movable comb tooth groups. ### Claim 10 (depends on 9) The vibration-driven energy harvester according to claim 9, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a total quantity of comb teeth included in the first fixed comb tooth portion and the first movable comb tooth portion is different from a total quantity of comb teeth included in the second fixed comb tooth portion and the second movable comb tooth portion. ### Claim 11 (depends on 9) The vibration-driven energy harvester according to claim 9, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a comb tooth height of at least either of the first fixed comb tooth portion and the first movable comb tooth portion, which are interdigitated with each other, is different from a comb tooth height of the second fixed comb tooth portion and the second movable comb tooth portion, which are interdigitated with each other. ### Claim 12 (depends on 9) The vibration-driven energy harvester according to claim 9, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a distance between comb teeth in the first fixed comb tooth portion and the first movable comb tooth portion, which are interdigitated with each other, is different from a distance between comb teeth in the second fixed comb tooth portion and the second movable comb tooth portion, which are interdigitated with each other. ### Claim 13 (depends on 9) The vibration-driven energy harvester according to claim 9, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a comb tooth length of the second fixed comb tooth portion or the second movable comb tooth portion is set smaller than a comb tooth length of the first fixed comb tooth portion and the first movable comb tooth portion, and the second fixed comb tooth portion and the second movable comb tooth portion are set to be a non-interdigitated state when no vibration is occurring. ### Claim 14 (depends on 9) The vibration-driven energy harvester according to claim 9, wherein: electrets are formed at at least either of comb teeth in the first vibration-driven energy harvesting assembly and comb teeth in the second vibration-driven energy harvesting assembly that are interdigitated with each other. ### Claim 15 (depends on 8) The vibration-driven energy harvester according to claim 8, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a total quantity of comb teeth included in the first fixed comb tooth portion and the first movable comb tooth portion is different from a total quantity of comb teeth included in the second fixed comb tooth portion and the second movable comb tooth portion. ### Claim 16 (depends on 8) The vibration-driven energy harvester according to claim 8, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a comb tooth height of at least either of the first fixed comb tooth portion and the first movable comb tooth portion, which are interdigitated with each other, is different from a comb tooth height of the second fixed comb tooth portion and the second movable comb tooth portion, which are interdigitated with each other. ### Claim 17 (depends on 8) The vibration-driven energy harvester according to claim 8, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a distance between comb teeth in the first fixed comb tooth portion and the first movable comb tooth portion, which are interdigitated with each other, is different from a distance between comb teeth in the second fixed comb tooth portion and the second movable comb tooth portion, which are interdigitated with each other. ### Claim 18 (depends on 8) The vibration-driven energy harvester according to claim 8, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: a comb tooth length of the second fixed comb tooth portion or the second movable comb tooth portion is set smaller than a comb tooth length of the first fixed comb tooth portion and the first movable comb tooth portion, and the second fixed comb tooth portion and the second movable comb tooth portion are set to be a non-interdigitated state when no vibration is occurring. ### Claim 19 (depends on 8) The vibration-driven energy harvester according to claim 8, wherein: electrets are formed at at least either of comb teeth in the first vibration-driven energy harvesting assembly and comb teeth in the second vibration-driven energy harvesting assembly that are interdigitated with each other. ### Claim 20 (depends on 1) The vibration-driven energy harvester used in the vibration-driven energy harvesting device according to claim 1, comprising: the first vibration-driven energy harvesting assembly constituted with the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration-driven energy harvesting assembly constituted with the second fixed comb tooth portion and the second movable comb tooth portion, wherein: electrets are formed at at least either of comb teeth in the first vibration-driven energy harvesting assembly and comb teeth in the second vibration-driven energy harvesting assembly that are interdigitated with each other; and an amount of electret charge per unit area in the first vibration-driven energy harvesting assembly is different from an amount of electret charge per unit area in the second vibration-driven energy harvesting assembly.